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Nanosurf is the market leader for custom developed systems for large and heavy samples. Over the past years our team has built a substantial knowledge base developing these custom stages for various customers.
Utilizing this vast body of knowledge, we have now developed a standard product for large samples up to 300 mm or heavy samples up to 45 kg. The Alphacen 300 reduces the price and the delivery time compared to a custom system.
Key Features
The tip-scanning AFM for heavy and large samples up to 300 mm
Standard AFM system
300 mm x 300 mm sample stage
Ideal for samples up to 45 kg
Run automated measurement series
The Alphacen 300 includes powerful automation software that allows the user to preselect the locations of interest, either on an optical image or a stage map, and let the system collect the images with no user intervention.
Heavy glass samples
Most large sample AFMs are capable of handling planar samples up to 200 mm, typically geared toward analysis of semiconductor wafers. However, one of the limitations of these systems is the sample weight that they can handle.
Alphacen 300 addresses the need for a standard AFM capable of imaging large and heavy samples with a weight limit of up to 45 kg. The Z-stage travel of 50 mm also allows for imaging of samples that are not thin silicon wafer.
Large, heavy samples are quite commonplace in the optical industry, e.g. in the production of large lenses and semiconductor industry, e.g. assembled cassettes or completed products.
Key Benefits
Alphacen 300 imaging modes
This overview shows which modes the instrument is capable of. Some modes may require additional components or software options. For details, please contact us.
Standard imaging modes
Static Force Mode
Lateral Force Mode
Dynamic Force Mode (Tapping Mode)
Phase Imaging Mode
Thermal imaging modes
Scanning Thermal Microscopy (SThM)
Magnetic properties
Magnetic Force Microscopy
Electrical properties
Conductive AFM (C-AFM)
Piezoelectric Force Microscopy (PFM)
Electrostatic Force Microscopy (EFM)
Kelvin Probe Force Microscopy (KPFM)
Scanning Spreading Resistance Microscopy (SSRM)
Mechanical properties
Force Spectroscopy
Force Modulation
Stiffness and Modulus
Adhesion
Unfolding and Stretching
Force Mapping
Other measurement modes
Lithography and Nanomanipulation
Electrochemical AFM (EC-AFM)
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Specifications
Scanner
Scan head type
Tip scanner
Max. scan range (XY)
100 µm(1)
Max. Z-range
10 µm(1)
XY linearity mean error
< 0.1%
XY flatness at max. scan range
typ. 5 nm
Z-sensor noise-level (RMS)
typ. 150 pm / max. 200 pm
Z-measurement noise level
(RMS, static mode in air)
typ. 100 pm / max. 200 pm
Z-sensor noise level
(RMS, dynamic mode in air)
typ. 25 pm / max. 35 pm
Optical detection light source
850 nm low coherence SLD
DC Detector noise
< 10 pm RMS (0.1 Hz to 1 kHz)
AC Detector noise
< 60 fm Hz-1/2 above 100 kHz
Detector bandwidth
DC to 4 MHz
(1) Manufacturing tolerances ± 10%
Stage
Top view field of view
5 MP, 1.5 mm x 1.1 mm
Side view field of view
5 MP, 3.2 mm x 3.2 mm
Max. sample size
300 mm x 300 mm x 45 mm
Max. sample weight
40 kg
Vacuum chuck for
4’’ / 6’’ / 8’’ / 12’’ wafers
Motorized XY travel range
300 mm x 300 mm
Motorized approach range
50 mm
System dimensions
1008 mm x 1887 mm x 1208 mm (fits through 800 mm door prior to assembling the acoustic enclosure)
System weight
833 kg
Stage XY resolution
< 1 µm
Unilateral repositioning accuracy
2 µm
Acoustic isolation
~30 dB above 250 Hz
Vibration isolation
Active vibration isolation
Controller
High resolution outputs (DAC)
12x 28 bit, 1 MHz/sampling; thereof 4x user DAC, ±10V/3dB@200kHz
Fast outputs (DAC)
4x 16 bit, 100 MHz/sampling; thereof 1x user DAC, ±1V/3dB@10MHz
High resolution inputs (ADC)
10x 20 bit, 1 MHz/sampling; thereof 4x user ADC, ±10V/3dB@200kHz
Fast inputs (ADC)
3x 16 bit, 100 MHz/sampling; thereof 1x user ADC, ±1V/3dB@10MHz
Signal analyzer
2 signal analyzer function blocks that can be configured as dual channel lock-in
FPGA module and embedded processor
System-on-chip module with low-latency FPGA signal processing at 100MHz and dual-core ARM processor, 2GB RAM, 1.5GHz clock
Scan control
28Bit X/Y/Z-DAC with ±10V/3dB@200kHz
Detector inputs
Deflection/lateral signals each 16 bit/3dB@10MHz and 28 bit/3dB@200kHz
Digital sync, Spike-Guard
2-bit line/frame sync out 5 V/TTL galvanically isolated, Spike-Guard input
Clock sync
10MHz/3V clock input to synchronize data acquisition and processing
Communication to PC
Gigabit Ethernet, galvanically isolated
Cantilever
Width
min. 20 μm
Length
min. 40 μm
Reflective coating
Reflective coating recommended
Liquid measurements
Yes, with gold coating
Alignment grooves
Required by default
Special cantilever holders without alignment grooves are available
Cantilever shape
Single rectangular cantilevers and multilever cantilevers (depending on scan head version and cantilever holder)
Chip thickness
300 μm, 500 μm or 600 μm depending on cantilever holder
The DriveAFM, Nanosurf‘s new flagship instrument, utilizes the latest technology to deliver stable, high-end performance. It was designed to fulfill the needs of top notch research, today and in the future.
CleanDrive: stable excitation in air and liquid
Ultra low noise: below 15 fm/√Hz
Direct drive: high-resolution imaging and large scan area
Datasheet
