New Product: Heidelberg Instruments’ MPO 100

Heidelberg instruments, an SRC supplier, is headquartered in Germany. They have been a world leader in developing and producing high-precision photolithography systems, maskless aligners, and nanofabrication tools for over 35 years. The MPO 100 is a Two-Photo Polymerization (TPP) multi-user tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics, and Biomedical Engineering. It includes a powerful femtosecond laser system operating at a wavelength of 266nm, enabling efficient and high-speed processing of many commercially available systems. As many photoresists exhibit high sensitivity at the 266nm TPP wavelength, the MPO 100 is an ideal tool for research and development to produce new material systems.

Unique features of the MPO 100: Printing height of over 1cm Surface quality: smooth surfaces down to 10nm High resolutions print: features sizes smaller than 100 nm High-speed 3D microfabrication: Scan Speeds over 1000 mm/s Temperature-controlled flow box to ± 0.1 °C with ISO4 environment Application-specific write modes enable fast and easy switching between 3D Lithography and 3D Microprinting. A synchronized scanning system enables stitching-free fabrication Various exposure and write modes tailored to the specific applications High-speed processing of ORMOCER®s (hybrid polymers) and other photoresists

The MPO 100 includes a powerful femtosecond laser system operating at a wavelength of 266 nm, enabling efficient and high-speed processing of many commercially available polymer systems.

The scanning system of the MPO 100 consists of high-performance, frictionless air-bearing stages synchronized with the high-speed galvo scanner. This enables a simultaneous movement of the sample and a deflection of the laser spot, thereby expanding the scan field (Field-of-View, FoV) of the microscope objective to the entire print area of 100 mm x 100 mm and thus providing the capability of stitching-free fabrication (infinite FoV).

Software

The MPO 100 includes the software package of LithoStream and LithoSoft3D as standard.

LithoStream is the MPO 100 control software. It provides unique features like printing time estimation, triangulation, process camera, alignment, print job creator, and application programming interface (API). Printing parameters can be saved into a database, and printing recipes can be loaded.

LithoSoft3D is code preparation software. It includes powerful modules to handle and process application-specific design formats such as stl- or bitmap files with advanced stitching options. Depending on the user‘s requirements, different trajectory models can be chosen, like a full volume scan, contour scan, or the combined contour hatch scan, as well as the LCON3D (real 3D Laser CONtouring).

About Heidelberg Instruments

Having over 35 years of experience and more than 1,200 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet all your micro- and Nanofabrication requirements, no matter how challenging.

To remain at the forefront of their industry, they continuously expand their vast knowledge in Micro- and Nanofabrication and work to advance their specialized engineering skills in mechanics, electronics, optics, and software. This combined unique expertise enables them to develop exclusive solutions that outperform conventional lithography machinery and empower customers.

Contact

SRC continues to offer our customers a range of innovative, high-quality scientific products and laboratory services for industrial and scientific marketing throughout Canada. For more information about the MPO 100 and how it can best serve your goals, we encourage you to reach out to a member of our staff.