Best laser lithography tool for 2.5D structures

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  • High-Precision Grayscale Lithography Systems for Micro-Optics & More

    • Minimum Feature Size: 500 nm
    • Write Modes: Five options with variable write speeds and resolutions
    • Max Substrate Size: DWL 2000 GS: 200 x 200 mm², DWL 4000 GS: 400 x 400 mm²
    • Exposure Speed: Up to 1000 mm²/min in grayscale mode
    • Automation Ready: Loading system, carrier station, pre-aligner & scanner options available

     


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