inLux SEM Raman Interface – in-situ SEM Raman Analysis

Introducing the inLux SEM Raman Interface – in-situ SEM Raman Analysis

The innovative inLux™ SEM Raman interface – in-situ SEM Raman Analysis brings high-quality Raman functionality to your scanning electron microscope (SEM) chamber. Now you can collect Raman spectra that can produce images in 2D and 3D whilst simultaneously imaging in SEM. The sample remains static between SEM imaging and Raman data collection modes, so you can be confident of precise co-location when comparing Raman images and SEM images.

The inLux interface offers a comprehensive range of Raman capabilities. You can collect spectra from single points, multiple points, or generate 2D and 3D confocal Raman images. The inLux interface comes fully equipped for all this work as standard, enabling you to analyse volumes larger than 0.5 mm in each axis. It features fully encoded position control, down to 50 nm, assuring precise Raman imaging.

Precisely co-localised SEM and Raman measurements

The innovative inLux SEM Raman interface brings high-quality Raman functionality to your SEM chamber. Now you can collect Raman spectra that can produce images in 2D and 3D whilst simultaneously imaging in SEM.

The sample remains static between SEM imaging and Raman data collection locations, so you can be confident of precise co-location when comparing Raman images and SEM images.

Key Features

Link surface composition and topography with chemical, structural and electronic information

• • Combine SEM, Raman, PL, optical images and spectral CL to deepen your scientific understanding.
  • Use true correlative microscopy to better understand and relate topographic, structural and chemical features within your samples.

Raman image creation and optical montaging made easy

• • One-click to switch between Raman collection and optical imaging modes.
  • Produce a large area, high-resolution optical image of your sample using optical montaging.Detailed Raman images can be obtained over 500 μm in three dimensions with minimum step size of 50 nm using Renishaw’s high performance RESOLUTE™ encoders.

Move the inLux probe and not your sample

• • The inLux probe is rastered over a stationary sample for targeting and Raman data collection in 2D or 3D.
  • With a fixed sample you can be confident in the correlation of your mutli-modal measurements.

Absolute security with encoded collision protection

• • Renishaw absolute encoders limit the motion of the inLux probe to a defined safe volume, even after power outages.
  • Safe in a multi-user environment because the operator cannot move the inLux probe out of the defined safe volume.

Key Benefits

Benefits of inLux SEM Raman Interface – in-situ SEM Raman Analysis:

• Information-rich – Raman, photoluminescence (PL) and spectral cathodoluminescence (CL) analysis is performed simultaneously and co-located with SEM imaging.
• Universal – The inLux interface can be mounted on a wide range of SEMs from different manufacturers, with different chamber sizes, and without any SEM modification.
• Non-invasive – The inLux probe can be fully retracted with a single click. This ensures that the probe does not interfere with other SEM functions or workflows when not in use.
• Determine distribution – Confocal Raman images can be produced as standard, thereby enabling easy measurement of sample heterogeneity.
• Sample viewing – Large area optical imaging and montaging for visualising your sample and targeting areas of interest.
• Configurable – Up to two different excitation laser wavelengths, plus an optional CL module.
• Automated – One-click switching of laser wavelengths for Raman analysis of challenging samples.

Specifications

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