Description
Achieve exceptional precision in thin-film coating applications with the Mini E-Beam Evaporator – EVAP Series by Nikalyte. Designed for research labs and production facilities, this compact UHV-compatible evaporator uses a finely controlled electron beam to directly heat crucibles, enabling efficient deposition of high-purity metals such as Gold, Silver, and Chrome.
Available in three configurations—Single Pocket (EVAP-1), Compact 4-Pocket (EVAP-4C), and High-Capacity 4-Pocket (EVAP-4)—this system enables co-evaporation of up to 4 materials, making it ideal for lift-off processes, contact metallization, and precise nanofabrication on heat-sensitive substrates.
By utilizing partial beam collimation and flux monitoring, the EVAP series ensures superior material utilization and reduced thermal impact, offering a major advantage over traditional e-beam hearth or thermal boat evaporators.
Features of Mini E-Beam Evaporators:
High-Precision Metal Deposition
- Direct electron beam heating of crucibles or rods
- Ideal for Au, Ag, Cr, and other metals
- Controlled evaporation with minimal substrate heating
Multi-Pocket Co-Evaporation
- EVAP-4 and EVAP-4C models support simultaneous 4-material evaporation
- Manual or pneumatic independent shutter control
Compact & UHV Compatible
- Mounts via NW40CF or NW63CF flange
- Bakeable up to 250°C
- Fully UHV compatible with minimal outgassing
Advanced Flux Monitoring
- Built-in ion flux plate measures deposition rate in real time
- Flux regulation, filament, and power control via combined 4-channel controller
Customizable & Efficient
- In-vacuum length customizable (standard 300 mm)
- Cooling flow: minimum 1.0 l/min
- Active copper cooling reduces heat radiation
Why You Should Buy:
- Minimizes waste of expensive materials like gold and platinum
- Compact footprint perfect for limited-space UHV chambers
- Fast setup and swap with replaceable crucibles and liners
- Superior for low-temperature thin-film deposition on delicate substrates
- Scalable for complex coating requirements using multi-pocket co-evaporation
Technical Specifications Summary:
| Model | EVAP-1 | EVAP-4C | EVAP-4 |
|---|---|---|---|
| Mount Flange | NW40CF (2.75″) | NW40CF (2.75″) | NW63CF (4.5″) |
| No. of Pockets | 1 | 4 | 4 |
| Co-Evaporation | No | Yes | Yes |
| Crucible Sizes | 210, 390, 1000 mm³ | 210, 390 mm³ | 210, 390, 1000 mm³ |
| Crucible Materials | Mo, VC, W | Mo, VC, W | Mo, VC, W |
| Crucible Liners | PBN, Al₂O₃ | PBN, Al₂O₃ | PBN, Al₂O₃ |
| Bakeable Temp | Up to 250°C | Up to 250°C | Up to 250°C |
| Flux Monitoring | Yes | Yes | Yes |
| Shutter Control | Manual/Pneumatic | Manual/Pneumatic | Manual/Pneumatic |
| Power Supply | Combined 4-channel | Combined 4-channel | Combined 4-channel |
| In-vacuum Length | 300 mm (customizable) | 300 mm (customizable) | 300 mm (customizable) |
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FAQs (Frequently Asked Questions):
Q: Can the EVAP system be integrated into an existing UHV system?
A: Yes! The EVAP series is fully UHV-compatible and can be integrated with custom or commercial vacuum chambers.
Q: What’s the thermal impact on substrates?
A: The evaporator is designed to have minimal heat load due to efficient heat absorption and active cooling, making it ideal for sensitive substrates.
Q: Is it possible to monitor deposition rates in real time?
A: Absolutely. Each unit comes with flux monitoring via ion flux plates, ensuring precise rate control.
Q: What materials are supported?
A: Common process metals like Gold (Au), Silver (Ag), Chrome (Cr) and more using crucible or rod feedstock.
Q: How is co-evaporation managed?
A: The EVAP-4 and 4C models include 4 independent crucible pockets, each controllable via the included 4-channel power supply.
